Maintenance and troubleshooting of cryopumps

Maintenance and troubleshooting of cryopumps

Although cryopumps are designed to be relatively self-sufficient, proper maintenance is still the key to ensure their long-term stable operation. It is necessary to regularly check the sealing of the pump body, electrical connections, and the amount of refrigerant. Common problems include a decrease in vacuum due to increased pump temperature, and it is necessary to check whether the refrigeration system is working properly. In addition, if the pumping speed is found to be significantly slowed down, it may be due to saturation or contamination of the internal adsorbent, and regeneration or replacement of the adsorbent is required. Keeping the area around the cryopump clean to prevent dust and impurities from entering the pump is also an important part of daily maintenance.