Working principle of cryopump

Working principle of cryopump

A cryopump is a device that uses a cryogenic surface to condense and adsorb gas molecules to obtain and maintain a vacuum environment. Its working principle is based on the characteristics that gas molecules on a cryogenic surface will be condensed and adsorbed. When the vacuum pump is started, the temperature of the internal cryogenic surface drops rapidly to close to -130°C, which is high enough to cause most gas molecules to lose heat energy and be adsorbed by the cryogenic surface. As the pressure inside the pump decreases, more gas molecules are captured, thus achieving a high vacuum state.